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Volumn 40, Issue 28, 2001, Pages 4958-4964

High-numerical-aperture scalar imaging

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL EQUATIONS; LIGHT PROPAGATION; PHOTORESISTS; SPECTRUM ANALYSIS; WAVE EQUATIONS;

EID: 0038488686     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.004958     Document Type: Article
Times cited : (22)

References (10)
  • 1
    • 0003361004 scopus 로고    scopus 로고
    • Optical lithography modeling
    • J. R. Sheats and B. W. Smith, edsMarcel Dekker, New York, Chap. 2
    • C. Mack, “Optical lithography modeling,” in Microlithography: Science and Technology, J. R. Sheats and B. W. Smith, eds. (Marcel Dekker, New York, 1998), Chap. 2, pp. 109-171.
    • (1998) Microlithography: Science and Technology , pp. 109-171
    • Mack, C.1
  • 2
    • 0026980816 scopus 로고
    • Derivation and simulation of higher numerical aperture scalar aerial images
    • D. C. Cole, E. Barouch, U. Hollerbach, and S. A. Orszag, “Derivation and simulation of higher numerical aperture scalar aerial images,” Jpn. J. Appl. Phys. 31, 4110-4119 (1992).
    • (1992) Jpn. J. Appl. Phys. , vol.31 , pp. 4110-4119
    • Cole, D.C.1    Barouch, E.2    Hollerbach, U.3    Orszag, S.A.4
  • 4
    • 0001521097 scopus 로고
    • Lithographic tolerances based on vector diffraction theory
    • D. G. Flagello and A. E. Rosenbluth, “Lithographic tolerances based on vector diffraction theory,” J. Vac. Sci. Technol. B 10, 2997-3003 (1992).
    • (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2997-3003
    • Flagello, D.G.1    Rosenbluth, A.E.2
  • 5
    • 0033698626 scopus 로고    scopus 로고
    • Deducing aerial image behavior from AIMS data
    • Proc. SPIE 4000, C. J. Progler, ed
    • R. L. Gordon, D. G. Flagello, and M. McCallum, “Deducing aerial image behavior from AIMS data,” in Optical Microlithography XIII, Proc. SPIE 4000, C. J. Progler, ed., 734-743 (2000).
    • (2000) Optical Microlithography XIII , pp. 734-743
    • Gordon, R.L.1    Flagello, D.G.2    Mc Callum, M.3
  • 6
    • 84902312921 scopus 로고
    • Ausbreitung elektromagnetischer Wellen uber einem ebenen Leiter
    • H. Weyl, “Ausbreitung elektromagnetischer Wellen uber einem ebenen Leiter,” Ann. Phys. (Leipzig) 60, 481-500 (1919).
    • (1919) Ann. Phys. (Leipzig) , vol.60 , pp. 481-500
    • Weyl, H.1
  • 10
    • 0000762928 scopus 로고
    • Image formation with partially coherent light
    • E. Wolf, ed.North-Holland, Amsterdam
    • B. J. Thompson, “Image formation with partially coherent light,” Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1969), Vol. 7, pp. 171-230.
    • (1969) Progress in Optics , vol.7 , pp. 171-230
    • Thompson, B.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.