Multi-aperture overlap-scanning technique for moire metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2861, Issue , 1996, Pages 107-112

  Chen, Ming Yi ^a   Wu, De Zhu ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

Moire metrology; Multi aperture overlap scanning; Pattern transformation and connection

Indexed keywords

MATHEMATICAL TRANSFORMATIONS; MOIRE FRINGES; SCANNING;

COMPLICATED SHAPE; MOIRE PATTERN; MOIRE TECHNIQUE; MULTI APERTURE; PATTERN TRANSFORMATIONS; SCANNING TECHNIQUES; SIMULATION TESTS; TOPOGRAPHIC MEASUREMENTS;

LASER INTERFEROMETRY;

EID: 0038470223     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.245156     Document Type: Conference Paper

References (5)

1. Maurice Halioua et al., "Automated 360 profilometry of 3-D diffuse objects," Appl. Opt., Vol. 24, pp. 2193-2196, 1985.
2. Anand k. Asundi et al., "360-deg profiiometry: new techniques for display and acquisition," Opt. Eng., Vol. 33, pp.2760-2769, 1994.
3. Ming-yi Chen et al., "Multi-aperture overlap-scanning technique for large aperture test," Proc. SPIE, Vol. 1553, pp.626-635, 1991.
4. Wei-ming Cheng et al., Homogeneous coordinates and subaperture transformation and connection, J. of Shanghai university of Science & Technique, Vol. 16, pp.363-369, 1993.
5. V. Scinivasan et al., "Automated phase-measuring profilometry: a phase mapping," Appl. Opt., Vol. 24, pp. 185-188, 1985.