Air-bridges, air-ramps, planarization, and encapsulation using pyrolytic photoresist in the fabrication of three-dimensional microstructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 1961-1965

  Porkolab, G A ^a   Chen, Y J ^a   Tabatabaei, Seyed Ahmad ^b   Agarwala, Sambhu ^b   Johnson, F G ^b   King, Oliver ^b   Dagenais, M ^b   Frizzell, Russell E ^c   Beard Jr , W T ^c   Stone, D R ^c  

^a University of Marylandw Baltimore County   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038451817     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589585     Document Type: Article

References (11)

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