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Volumn 86, Issue 4, 1999, Pages 1843-1847
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Hydrogen role on the properties of amorphous silicon nitride
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0038450121
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.370977 Document Type: Article |
Times cited : (92)
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References (34)
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