Apparatus for pulsed laser deposition of semiconductor thin films

Review of Scientific Instruments

Volumn 74, Issue 6, 2003, Pages 3160-3163

  Oszwaldowski, M ^a   Berus, T ^a   Sydorczuk, P ^a   Rzeszutek, J ^a  

^a POZNAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; FILM GROWTH; PULSED LASER DEPOSITION; SUPERLATTICES;

OPTICAL DEFLECTORS;

THIN FILMS;

EID: 0038449307     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1571947     Document Type: Article

References (9)

1. J. T. Cheung and H. Sankur, CRC Crit. Rev. Solid State Mater. Sci. 15, 63 (1988).
2. J. J. Dubowski, Acta Phys. Pol. A 80, 221 (1991).
3. A. Christley, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
4. T. Miller, Laser Ablation. Principles and Applications (Springer, Berlin, 1994).
5. J. J. Dubowski, Chemtronics 3, 66 (1988).
6. R. Dornhaus, G. Nimtz, and B. Schlicht, Narrow-Gap Semiconductors (Springer, Berlin, 1985).
7. Yu. Sokolov, M. Oszwaldowski, and H. Szweycer. Izv. Akad. Nauk SSSR, Neorg. Mater. 27, 152 (1991).
8. D. M. Freik, M. A. Galushtchak, and L. I. Mezhilovskaya, Physics and Technology of Semiconductor Thin Films (Izd. Lvovskii Gisudarstvennyi Universitet, Lvov, 1988).
9. M. Oszwaldowski, T. Berus, J. Rzeszutek, P. Sidorchuk, J. Polit, and E. Sheregii, EMRS Fall Meeting 20002, Symposium G: Solid Solutions of the II-VI Compounds - Growth, Characterization and Applications, Zakopane, Poland, October 14-18, 2002; J. Alloys Compd. (accepted).