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Volumn 10, Issue 13, 2002, Pages 556-560
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Realization of ultrasmooth surface with atomic scale step structure on LiNbO3 and LiTaO3 substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
EPITAXIAL GROWTH;
LATTICE CONSTANTS;
LIGHT MODULATORS;
OPTICAL WAVEGUIDES;
OPTOELECTRONIC DEVICES;
SCANNING ELECTRON MICROSCOPY;
SURFACE ROUGHNESS;
SURFACES;
CARBON FILMS;
MECHANOCHEMICAL POLISHING;
SCANNING MICROSCOPY;
SURFACE SCATTERING;
LITHIUM NIOBATE;
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EID: 0038445224
PISSN: 10944087
EISSN: None
Source Type: Journal
DOI: 10.1364/OE.10.000556 Document Type: Article |
Times cited : (26)
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References (10)
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