Characterization of phosphosilicate thin films using confocal Raman microscopy

Review of Scientific Instruments

Volumn 71, Issue 5, 2000, Pages 2117-2120

  Matthews, Manyalibo J ^a   Harris, Alexander L ^a   Bruce, Allan J ^a   Cardillo, Mark J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038422247     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150591     Document Type: Article

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