BEOL post ash residue removal using DSP* chemistry in an FSI batch spray tool

Solid State Phenomena

Volumn 92, Issue , 2003, Pages 117-120

  Vroom, René ^a   Gogg, Georg ^b   O'Dwyer, Jerry ^b  

^a NXP SEMICONDUCTORS   (Netherlands)

^b NONE

Author keywords

"Pious" ring; Dilute sulfuric peroxide (DSP); Polymer removal

Indexed keywords

DIELECTRIC MATERIALS; METALS; ORGANIC SOLVENTS; REMOVAL; SEMICONDUCTING POLYMERS; TITANIUM NITRIDE; DIGITAL SIGNAL PROCESSING; OXIDATION; PEROXIDES;

DILUTE SULFURIC PEROXIDE; POST ASH RESIDUE REMOVAL; WET CLEANING; DIELECTRIC LAYER; DILUTE SULFURIC PEROXIDE (DSP); ETCH PROCESS; OVER-ETCH; POLYMER REMOVAL; RESIDUE REMOVAL; SOLUTION TEMPERATURE;

ETCHING; POLYMERS;

EID: 0038407225     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.92.117     Document Type: Conference Paper

References (0)