Concept, modeling and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 271-278

  Yang, Eui Hyeok ^a   Shcheglov, Kirill ^a   Trolier McKinstry, Susan ^b  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Adaptive Optics (AO); Continuous Mirror; Deformable Mirror (DM); Microelectromechanical Systems (MEMS); Piezoelectric Actuator; Unimorph Membrane; Wafer Scale Membrane Transfer

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; IMAGING TECHNIQUES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL TELESCOPES; PIEZOELECTRIC DEVICES;

DEFORMABLE MIRRORS;

MIRRORS;

EID: 0038395931     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473715     Document Type: Conference Paper

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