Spectroscopic evidence for hydrogen diffusion through a several-nanometers-thick titanium carbonitride layer on silicon

Journal of the American Chemical Society

Volumn 125, Issue 24, 2003, Pages 7196-7197

  Bocharov, Semyon ^a   Teplyakov, Andrew V ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON; TITANIUM CARBONITRIDE; TITANIUM DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL STRUCTURE; DIFFUSION; FILM; FOURIER TRANSFORMATION; INFRARED SPECTROSCOPY; PROTON TRANSPORT; ROOM TEMPERATURE; SPECTROSCOPY; STRUCTURE ANALYSIS; TEMPERATURE DEPENDENCE; THERMOSTABILITY;

EID: 0038391393     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja035026f     Document Type: Article

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