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Volumn 92, Issue , 2003, Pages 223-226
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Ozone-gas concentration measurements for photoresist stripping
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Author keywords
Oxidation reaction; Ozone concentration; Photoresist removal
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Indexed keywords
OXIDATION;
OZONE;
PHENOLS;
PHOTORESISTS;
SENSORS;
ULTRAVIOLET RADIATION;
DROPS;
BENZOQUINONE GROUPS;
LOADING EFFECT;
OZONE CONCENTRATION;
PHENOLIC GROUPS;
PHOTORESIST STRIPPING;
ULTRAVIOLET SENSOR;
FUNCTION OF TIME;
OXIDATION REACTIONS;
PHOTO-RESIST STRIP PROCESS;
PHOTORESIST REMOVAL;
RELATIVE CONCENTRATION;
STRIPPING (REMOVAL);
OZONE;
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EID: 0038377593
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.92.223 Document Type: Conference Paper |
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Times cited : (9)
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References (4)
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