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Volumn 81, Issue 2-3, 2003, Pages 566-568
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Transmission electron microscopy investigation of the microstructure and chemistry of Si/Cu/In/Cu/Si interconnections
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Author keywords
Cu In system; Diffusion soldering; Intermetallics; Isothermal solidification
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Indexed keywords
CHEMICAL BONDS;
ENERGY DISPERSIVE SPECTROSCOPY;
METALLIZING;
SILICON COMPOUNDS;
SOLDERING;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY ANALYSIS;
ISOTHERMAL SOLIDIFICATION;
INTERMETALLICS;
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EID: 0038373430
PISSN: 02540584
EISSN: None
Source Type: Journal
DOI: 10.1016/S0254-0584(03)00076-2 Document Type: Conference Paper |
Times cited : (26)
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References (13)
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