Epitaxial growth of cubic silicon carbide on silicon by sublimation method

Optical Materials

Volumn 23, Issue 1-2, 2003, Pages 39-42

  Feng, Xianfeng ^a   Chen, Zhiming ^a   Ma, Jianping ^a   Zan, Xiang ^a   Pu, Hongbin ^a   Lu, Gang ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

3C SiC; CVD; Si; Sublimation epitaxy

Indexed keywords

EPITAXIAL GROWTH; RAMAN SCATTERING; SILICON CARBIDE; SUBLIMATION; X RAY DIFFRACTION ANALYSIS;

SUBLIMATION GROWTH;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0038348731     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(03)00056-9     Document Type: Conference Paper

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