Development and calibration of standards for the coating thickness in the range of micrometer and nanometer

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 732-734

  Hoffmann, K P ^a   Ahbe, T ^a   Herrmann, K ^a   Hasche, K ^a   Pohlenz, F ^a   Sun, J ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Atom force microscopy; Interferometry; Monolayer; Profilometry; Scanning electron microscopy; Traceability

Indexed keywords

MEASUREMENTS; SCANNING ELECTRON MICROSCOPY; STANDARDIZATION;

SCANNING FORCE MICROSCOPY (SFM);

COATING TECHNIQUES;

SCANNING ELECTRON MICROSCOPY;

EID: 0038347257     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00213-5     Document Type: Article

References (4)

1. T. Ahbe, N. Haft, K. Hasche, K.-P. Hoffmann, Geometrical measurements on film structures using a scanning electron microscope, in: Micro System Technologies 98, Sixth International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam/ Germany, December 1-3, 1998, pp. 627-629
2. K.-P. Hoffmann, Preparation of cross-sections for measuring the thickness of coatings, in: Progress in Precision Engineering and Nanotechnology, Proceedings of Ninth International Precision Engineering Seminar/Fourth Conference on Ultraprecision in Manufacturing Engineering, vol. 1, Braunschweig/Germany, May 26-30, 1997, pp. 191-193
3. K. Hasche, K. Herrmann, W. Mirandé, F. Pohlenz, R. Seemann, Development of scanning force microscopy with subnanometric capability, Proceedings of the Fourth Seminar on Quantitative Microscopy QM 2000, Semmering/Austria, January 12-14, 2000 (PTB-Bericht PTB-F-39), pp. 219-225
4. K. Hasche, K. Herrmann, M. Krumrey, et al., Calibrated reference standards for films in the nanometer range, Proceedings of the Second International Euspen Conference, vol. 2, Turin/Italy, May 27-31, 2001, pp. 396-399