RF-magnetron sputtered conductive perovskite BaPbO3 films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 1, 2003, Pages 242-246

  Luo, Yih Rong ^a   Wu, Jenn Ming ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

BaPbO3; Chemical bonding; Electrical properties; Oxide electrode; Perovskite; Sputtering

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; CHEMICAL BONDS; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; CRYSTALLIZATION; ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; PEROVSKITE; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

BARIUM LEAD TRIOXIDE; CRYSTALLINITY;

BARIUM COMPOUNDS;

EID: 0038343592     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.42.242     Document Type: Article

References (17)

1. G. H. Heartling: J. Vac. Sci. Technol. A 9 (1991) 414.
2. M. Sayer and K. Sreenivas: Science 247 (1990) 105.
3. L. M. Sheppard: Ceram. Bull. 70 (1991) 85.
4. P. K. Larsen, R. Cuppens and G. A. C. M. Spierings: Ferroelectrics 128 (1992) 265.
5. D. R. Uhlmann, G. Teowee, J. M. Viulton, S. Motakef and S. C. Lee: J. Non-Cryst. Solids 147-148 (1992) 409.
6. H. N. Al-Shareef, A. I. Kingon, X. Chen, K. R. Buller and O. Auciello: J. Mater. Res. 9 (1994) 2968.
7. C. B. Eom, R. B. V. Dover, J. M. Phillips, R. M. Fliming, R. J. Cava, J. H. Marshall, D. J. Werder, C. H. Chen and D. K. Fork: Mater. Res. Soc. Symp. Proc. 310 (1993) 145.
8. D. P. Vijat and S. B. Desu: J. Electrochem. Soc. 140 (1993) 2640.
9. T. Nakamuna, Y. Nakao, A. Kamisawa and H. TakaSu: Jpn. J. Appl. Phys. 33 (1994) 5207.
10. R. Ramesh, W. K. Chan, B. Wilkens, H. Gilchrist, T. Sands, J. M. Tarascon, V. G. Keramdas, D. K. Fork, J. Lee and A. Safari: Appl. Phys. Lett. 61 (1992) 1537.
11. M. S. Chen, T. B. Wu and J. M. Wu: Appl. Phys. Lett. 68 (1996) 1430.
12. T. Nitta, K. Nagase, S. Hayakawa and Y. Iida: J. Am. Ceram. Soc. 48 (1965) 642.
13. H. Ikushima and S. Hayakawa: Solid-State Electron. 9 (1966) 921.
14. R. D. Shannon and P. E. Bierstedt: J. Am. Ceram. Soc. 53 (1970) 635.
15. Y. R. Luo and J. M. Wu: Appl. Phys. Lett. 79 (2001) 3669.
16. D. K. Schroder: Semiconductor Material and Device Characterization (John Wiley & Sons, New York, 1998) 2nd ed., Chap. 8, p. 509.
17. J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben: Handbook of X-ray Photoelectron Spectroscopy, eds. J. Chastain (Perkin-Elmer, Eden Prairie, MN, 1992).