Improved hydrogen depth profiles with in-chamber annealing of hydrogenated amorphous silicon thin films

Journal of Applied Physics

Volumn 79, Issue 1, 1996, Pages 175-178

  Ruther R ^a   Livingstone, J ^a   Dytlewski, N ^b   Cohen, D ^b  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038331482     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360927     Document Type: Article

References (25)

1. M. Pinarbasi, N. Maley, A. Myers, and J. R. Abelson, Thin Solid Films, 171, 217 (1989).
2. C. R. Wronski, 21st IEEE Photovoltaic Specialists Conference, Florida, 1990 (IEEE, New York, 1990), p. 1487.
3. B. von Roedern, 10th European Photovoltaic Solar Energy Conference, Lisbon, Portugal, 1991 (Kluwer Academic, Dordrecht, 1991), p. 1197.
4. N. Beldi, J. Sib, L. Chahed, T. Smail, T. Mohammed-Brahim, Z. Djehbour, J. P. Kleider, C. Longeaud, and D. Mencaraglia, J. Non-Cryst. Solids 164-166, 309 (1993).
5. O. V. Polyakov and A. M. Badalian, Phys. Status Solidi B 185, K1 (1994).
6. M. Wakagi, K. Ogata, and A. Nakano, Phys. Rev. B 50, 10666 (1994).
7. Y. H. Yang, M. Katiyar, G. F. Feng, N. Maley, and J. R. Abelson, Appl. Phys. Lett. 65, 1769 (1994).
8. Y. H. Liang, N. Maley, and J. R. Abelson, J. Appl. Phys. 75, 3704 (1994).
9. D. L. Staebler and C. R. Wronski, Appl. Phys. Lett. 31, 292 (1977).
10. D. E. Carlson, in Disordered Semiconductors, edited by M. Kastner, G. Thomas, and S. Ovshinsky (Plenum, New York, 1987), p. 613.
11. A. Asano, Appl. Phys. Lett. 56, 533 (1990).
12. Y. Ashida, M. Koyama, K. Miyachi, H. Tanaka, N. Fukuda, and A. Nitta, 22nd IEEE Photovoltaic Specialists Conference, Las Vegas, 1991 (IEEE, New York, 1991), p. 1352.
13. I. An, Y. Li, C. R. Wronski, and R. W. Collins, Material Research Society Spring Meeting '92, San Francisco (Materials Research Society. Pittsburgh, 1992), Vol. 258, p. 27.
14. P. J. Zanzucchi, in Semiconductors and Semimetals, edited by J. I. Pankove (Academic, New York, 1984), Vol. 21B, p. 113.
15. P. D'Antonio and J. H. Konnert. Tetrahedrally Bonded Amorphous Semiconductors, AIP Conf. No. 73, Carefree, 1981 (AIP, New York, 1981), p. 117.
16. Y. Minamino, Y. Nitta, K. Fujisawa, H. Kubo, C. Iwasaki, T. Minato, K. Tomita, and K. Ishibitsu, 17th IEEE Photovoltaic Specialists Conference, 1984 (IEEE, New York, 1984), p. 229.
17. P. Irsigler, D. Wagner, and D. J. Dunstan, J. Non-Cryst. Solids 69, 207 (1985).
18. I. Hirabayashi, K. Morigaki, and M. Yoshida, Solar Energy Mater. 8, 153 (1982).
19. R. Rüther and J. Livingstone, 30th Annual Conference of the Australian and New Zealand Solar Energy Society, Darwin, Australia, 1992 (ANZSES, Melbourne, 1992), p. 301.
20. R. Rüther and J. Livingstone, Thin Solid Films 226, 59 (1993).
21. M. H. Brodsky, M. Cardona, and J. J. Cuomo, Phys. Rev. B 16, 3556 (1977).
22. C. J. Fang, K. J. Gruntz, L. Ley, M. Cardona, F. J. Demond, G. Müller, and S. Kalbitzer, J. Non-Cryst. Solids 35-36, 255 (1980).
23. N. Maley and I. Szafranek, Mater. Res. Soc. Symp. Proc. 192, 663 (1990).
24. R. Rüther, J. Livingstone, N. Dytlewski, and D. Cohen, Phys. Status Solidi A 145, K37 (1994).
25. H. Shirai and B. Drevillon, Jpn. J. Appl. Phys. 33, L1577 (1994).