Laser structuring method for MID (LAMP2002)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 25-29

  Muto, Masahide ^a   Uchinono, Yoshiyuki ^a   Hirota, Masayuki ^a   Suzuki, Toshiyuki ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

3 D; Circuit; MID; NaPiOn; Patterning; Removing; Structuring

Indexed keywords

COPPER; ELECTROOPTICAL DEVICES; LASER PULSES; LIGHT ABSORPTION; PHOTORESISTS; SENSORS; THIN FILMS;

PATTERNING CIRCUITS;

LASER BEAM EFFECTS;

EID: 0038324311     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486551     Document Type: Conference Paper

References (1)

1. M. Muto, Y. Uchinono, M. Hirota, T. Suzuki: LEF2001, (2001) pp.93-101.