Micro machining of ITO film by LD pumped SHG YAG laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 40-45

  Okamoto, Yasuhiro ^a   Uno, Yoshiyuki ^a   Hirao, Yasuyuki ^a  

^a OKAYAMA UNIVERSITY   (Japan)

Author keywords

Backside irradiation; ITO film; LD pumped; SHG YAG laser; Transparent electrode

Indexed keywords

CONDUCTIVE FILMS; ELECTRIC INSULATION; ETCHING; GLASS; LASER BEAM EFFECTS; MICROMACHINING; PUMPING (LASER); SUBSTRATES;

TRANSPARENT ELECTRODES;

Q SWITCHED LASERS;

EID: 0038324300     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486573     Document Type: Conference Paper

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