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Volumn 4830, Issue , 2002, Pages 346-351
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Picosecond-laser system for photomask repair with nanometer accuracy
a
NEC CORPORATION
(Japan)
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Author keywords
Ablation; Mode locking; Photomask repair; Picosecond; Solid state laser; Ultra violet
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Indexed keywords
DYNAMIC RANDOM ACCESS STORAGE;
LASER ABLATION;
LASER MODE LOCKING;
POWER AMPLIFIERS;
Q SWITCHED LASERS;
SOLID STATE LASERS;
ULTRAVIOLET RADIATION;
PHOTOMASK REPAIR;
MASKS;
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EID: 0038297379
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.486582 Document Type: Conference Paper |
Times cited : (1)
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References (5)
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