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Volumn 4830, Issue , 2002, Pages 346-351

Picosecond-laser system for photomask repair with nanometer accuracy

Author keywords

Ablation; Mode locking; Photomask repair; Picosecond; Solid state laser; Ultra violet

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; LASER ABLATION; LASER MODE LOCKING; POWER AMPLIFIERS; Q SWITCHED LASERS; SOLID STATE LASERS; ULTRAVIOLET RADIATION;

EID: 0038297379     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.486582     Document Type: Conference Paper
Times cited : (1)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.