Auto-correlation function analysis of crystallization in amorphous SiGe thin films

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 339-343

  Chiang, T F ^a   Wu, W W ^a   Cheng, S L ^a   Lin, H H ^a   Lee, S W ^a   Chen, L J ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Amorphous; Auto correlation function; Crystallization; Si; SiGe

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTALLIZATION; HIGH RESOLUTION ELECTRON MICROSCOPY; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON COMPOUNDS;

AUTO-CORRELATION FUNCTION;

THIN FILMS;

EID: 0038241601     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00098-9     Document Type: Conference Paper

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