Retardation modulated differential interference microscope and its application to 3-D shape measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2873, Issue , 1996, Pages 21-24

  Ishiwata, Hiroshi ^a   Itoh, Masahide ^b   Yatagai, Toyohiko ^b  

^a OLYMPUS CORPORATION   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPES; POLARIZATION;

3-D SHAPE MEASUREMENT; DIFFERENTIAL INTERFERENCE; ITS APPLICATIONS; PARTIAL COHERENT; PHASE INFORMATION;

IMAGE ENHANCEMENT;

EID: 0038239405     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.246219     Document Type: Conference Paper

References (4)

1. G. M. Nomarski, J. Phys. Radium Paris 16, 9S (1955).
2. M. Francon Progress in Microscopy, Pregamon Press, p. 199 (1961).
3. T. Yatagai, Proc. SPIE, CR 46. 197 (1992)
4. G. S. Bhataagar, R. S. Siroshi, Opt. Acta 18. 547 (1971)