Micro-fabrication of single crystal silicon by using combination technique of nano-scale machining and alkaline etching

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 67, Issue 9, 2001, Pages 1453-1457

  Chen, Liyi ^a   Morita, Noboru ^a   Ashida, Kiwamu ^a  

^a NONE

Author keywords

Friction Force Microscope; KOH Etching; Micro structure; Single Crystal Silicon; Ultrasonic Cleaning

Indexed keywords

EID: 0038183063     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.67.1453     Document Type: Article

References (5)

1. H.Seidel, L.Csepregi, A.Heuberger, and H. Baumgartel: J. Electrochem. Soc,. Vol. 137, No. 11 (1990) 3612.
2. J. A. Dagata et al., Appl. Phys. Lett. ,56, 2001 (1990)