Titanium oxy-nitride films deposited on stainless steel by an ion beam assisted deposition technique

Journal of Materials Science

Volumn 38, Issue 9, 2003, Pages 2011-2018

  Yokota, K ^a   Nakamura, K ^a   Kasuya, T ^a   Tamura, S ^a   Sugimoto, T ^a   Akamatsu, K ^a   Nakao, K ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRON BEAMS; EVAPORATION; HARDNESS; ION BEAM ASSISTED DEPOSITION; ION SOURCES; MICROWAVES; STAINLESS STEEL; SUBSTRATES; TITANIUM COMPOUNDS;

SURFACE LAYERS;

MATERIALS SCIENCE;

EID: 0038176116     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023545623293     Document Type: Article

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