Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 518-521

  Abe, Takashi ^a   Li, Li ^a   Hung, Vu Ngoc ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ENERGY DISSIPATION; MICROANALYSIS; Q FACTOR MEASUREMENT; QUARTZ APPLICATIONS; REACTIVE ION ETCHING; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

EXPONENTIAL FUNCTION; QUARTZ CRYSTAL MICROBALANCE; ULTRAHIGH SENSITIVE GRAVIMETRY;

GRAVIMETRIC ANALYSIS;

EID: 0038155525     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. G. Sauerbrey, "Verwendung von Schwingquarsen zur Wängung dünner Schichten und zur Mikrowängung" Z. Phys. 155, pp. 206-222, 1959.
2. a) T. Abe, M. Esashi, "One-chip multichannel quartz crystal microbalance (QCM) fabricated by deep RIE" Technical Digest of Transducer '99, pp. 1246-1249, 1999.
3. b) T. Abe, M. Esashi, "One-chip multichannel quartz crystal microbalance (QCM) fabricated by deep RIE" Sens. and Actuators A 82, pp. 139-143, 2000.
4. T. Tatsuma, Y. Watanabe, N. Oyama, K. Kitakizaki, M. Haba, "Multichannel quartz crystal microbalance" Anal. Chem. 71 pp. 3632-3636, 1999.
5. W. Shockley, D.R. Curran, D.J. Koneval, "Trapped-energy modes in quartz filter crystals", J. Acoust. Soc. Am. 41, pp. 981-993, 1967.
6. B. Zimmermann, R. Lucklum, P. Hauptmann, J. Rabe and S. Büttgenbach "Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis" Sens. Actuators B 76, pp. 47-57, 2001.