Surface micromachined glass and polysilicon microchannels using MUMPs

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 578-581

  Lee, Ki Bang ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FOUNDRY PRACTICE; GLASS; MATERIALS TESTING; MICROMACHINING; POLYSILICON; SURFACE TENSION; SURFACES; WATER;

MICROMACHINED GLASS MICROCHANNELS; MULTI USER MEMS PROCESS; POLYSILICON MICROMACHANNELS; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0038155506     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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