Mesoporous silica thin films produced by calcination in oxygen plasma

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 504-507

  Gomez Vega, Jose M ^a   Teshima, Katsuya ^a   Hozumi, Atsushi ^b   Sugimura, Hiroyuki ^a   Takai, Osamu ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Coating; Mesoporous silica; Oxygen plasma; Triblock copolymer

Indexed keywords

CALCINATION; MESOPOROUS MATERIALS; SOL-GELS; THIN FILMS; X RAY DIFFRACTION;

STRUCTURE-DIRECTING AGENTS;

SILICA;

CALCINATION; COATING; FILM; PLASMA TREATMENT; SURFACE TREATMENT;

EID: 0038130571     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00155-5     Document Type: Article

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