An active microvibration isolation system for hi-tech manufacturing facilities

Journal of Vibration and Acoustics, Transactions of the ASME

Volumn 123, Issue 2, 2001, Pages 269-275

  Yoshioka, H ^a   Takahashi, Y ^b   Katayama, K ^b   Imazawa, T ^b   Murai, N ^b  

^a UNIVERSITY OF NOTRE DAME   (United States)

^b TAKENAKA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038114357     PISSN: 10489002     EISSN: 15288927     Source Type: Journal    
DOI: 10.1115/1.1350566     Document Type: Article

References (13)

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