Fabrication of microfluidic-devise (diffuser or mixer) using aerosol deposition method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4936, Issue , 2002, Pages 234-240

  Akedo, Jun ^a   Lebedev, Maxim ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition method; Microactuator; Microdiffuser; Micromixer; Micropump; PZT

Indexed keywords

AEROSOLS; DEPOSITION; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS;

MICROMIXER;

MICROACTUATORS;

EID: 0038079298     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.471922     Document Type: Conference Paper

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