Band-stop magnetostatic wave resonators on micromachined silicon membrane

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4981, Issue , 2003, Pages 156-163

  Marcelli, Romolo ^a   Sajin, George ^b   Craciunoiu, Florea ^b   Cismaru, Alina ^b  

^a CNR   (Italy)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Micromachining; Microwave resonators; Silicon membrane; YIG monocristalline film

Indexed keywords

BANDWIDTH; MEMBRANES; MICROMACHINING; MICROWAVES; SILICON;

SILICON MEMBRANE;

RESONATORS;

EID: 0038059081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473375     Document Type: Conference Paper

References (11)

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