Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 4055-4057

  Zhuang, Lei ^a   Schablitsky, Steve ^a   Shi, Rick C ^a   Chou, Stephen Y ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038043031     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588643     Document Type: Article

References (7)

1. M. Shimizu, F. Koyama, and K. Iga, Jpn. J. Appl. Phys. 27, 1774 (1988).
2. K. Choquette and R. Leibenguth, IEEE Photon. Technol. Lett. 6, 40 (1994).
3. T. Yoshikawa, H. Kosaka, K. Kurihara, M. Kajita, Y. Sugimoto, and K. Kasahara, Appl. Phys. Lett. 66, 908 (1995).
4. T. Mukaihara, F. Koyama, and K. Iga, IEEE Photon. Technol. Lett. 5, 133 (1993).
5. D. Vakhshoori, Appl. Phys. Lett. 65, 259 (1994).
6. T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, and F. Koyama, IEEE J. Quantum Electron. 1, 667 (1995).
7. S. Y. Chou and W. Deng, Appl. Phys. Lett. 67, 742 (1995).