X-ray fluorescence tomography for non-destructive semi-quantitative study of microobjects

Journal De Physique. IV : JP

Volumn 104, Issue , 2003, Pages 627-630

  Chukalina, M ^a   Simionovici, A ^b,c   Lemelle, L ^c   Rau, C ^b   Vincze, L ^d   Gillet, Ph ^c  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c UNIVERSITÉ DE LYON   (France)

^d UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; DENSITY (OPTICAL); FLUORESCENCE; IMAGE RECONSTRUCTION; NONDESTRUCTIVE EXAMINATION; OPTICAL DESIGN; REFRACTIVE INDEX; SPECTRUM ANALYSIS; X RAY OPTICS;

ATOMIC DENSITY DISTRIBUTION FUNCTION; MICROOBJECT; NONDESTRUCTIVE SEMI-QUANTITATIVE; X RAY FLUORESCENCE TOMOGRAPHY;

COMPUTERIZED TOMOGRAPHY;

EID: 0038025640     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20030158     Document Type: Conference Paper

References (13)

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