Laser assisted deposition of nanopatterned biomolecular layers

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 923-929

  Gerardino, A ^a   Notargiacomo, A ^b   Morales, P ^c  

^a CNR   (Italy)

^b ROMA TRE UNIVERSITY   (Italy)

^c ENEA   (Italy)

Author keywords

Biomolecules; Electron beam lithography patterning; Laser deposition

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAM LITHOGRAPHY; IONIZATION; MACROMOLECULES; PULSED LASER DEPOSITION; ULTRATHIN FILMS;

BIOMOLECULES;

MICROELECTRONICS;

EID: 0038020044     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00155-2     Document Type: Conference Paper

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