SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 371-374

Fabrication of α-SiC heteroepitaxial films by YAG-PLAD method

(2) Muto, Hachizo a Kusumori, Takeshi a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Heteroepitaxial film; Pulsed laser ablation; RHEED; X ray diffraction; SiC

Indexed keywords

EPITAXIAL GROWTH; HARMONIC ANALYSIS; LASER ABLATION; LOW TEMPERATURE EFFECTS; PULSED LASER DEPOSITION; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SAPPHIRE; SILICON CARBIDE; SILICON WAFERS; X RAY DIFFRACTION; ABLATION; FILM PREPARATION; NEODYMIUM LASERS; PULSED LASERS; YTTRIUM ALUMINUM GARNET;

CRYSTALLINE FILMS; HETEROEPITAXIAL FILMS; PULSED LASER ABLATION; SUBSTRATE PLANES; LOW TEMPERATURES; ND : YAG LASERS; ORIENTED FILMS; PREPARATION TECHNIQUE; PULSED LASER ABLATION DEPOSITIONS; SI(111) SUBSTRATE;

EPITAXIAL FILMS; SILICON CARBIDE;

EID: 0038009903 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.389-393.371 Document Type: Article

Times cited : (6)

References (11)

1
- 0027577002
- J. A. Edmond, H. S. Kong, and C. H. Carter Jr.: Physica B Vol.185 (1993), p.453.
- (1993) Physica B , vol.185 , pp. 453
- Edmond, J.A.¹ Kong, H.S.² Carter Jr., C.H.³

2
- 21544461610
- H. Morkoc, S. Strite, G. B.Gao, M. E. Lin, B. Sverdlov, and M. J. Burns: Appl. Phys. Vol.76 (1994), p.1363.
- (1994) Appl. Phys , vol.76 , pp. 1363
- Morkoc, H.¹ Strite, S.² Gao, G.B.³ Lin, M.E.⁴ Sverdlov, B.⁵ Burns, M.J.⁶

3
- 0041760486
- A. Tayer, and D. S. Laidler: Brit. J. Appl. Phys. Vol.1 (1950),p.174.
- (1950) Brit. J. Appl. Phys , vol.1 , pp. 174
- Tayer, A.¹ Laidler, D.S.²

4
- 0011780365
- A. H. Gomes de Mesquita: Acta Crystallogr. Vol.23 (1967),p. 610;
- (1967) Acta Crystallogr , vol.23 , pp. 610
- Gomes de Mesquita, A.H.¹

5
- 0037672044
- Analytical Chemistry
- J. Itoh, M. Iwatsuki, and T. Fukazawa: Bunseki Kagaku (Analytical Chemistry) Vol.2 (1993),p.445.
- (1993) Bunseki Kagaku , vol.2 , pp. 445
- Itoh, J.¹ Iwatsuki, M.² Fukazawa, T.³

6
- 0022777994
- S. Kaneda, Y. Sakamoto, C. Nishi, M. Kanaya and S. Hannai: J. J. Appl. Phys. Vol.25 (1986),p.1307.
- (1986) J. J. Appl. Phys , vol.25 , pp. 1307
- Kaneda, S.¹ Sakamoto, Y.² Nishi, C.³ Kanaya, M.⁴ Hannai, S.⁵

7
- 0031515387
- H. Nagasawa, and K. Yagi, Phys. Stat. Sol.(B), Vol.202 (1997) p.335.
- (1997) Phys. Stat. Sol.(B) , vol.202 , pp. 335
- Nagasawa, H.¹ Yagi, K.²

8
- 0034818407
- Y.Wang, J. Lin, C. H. A. Huan, Z.C. Feng, and S.J. Chua: Thin Solid Films Vol.384 (2001),p 173.
- (2001) Thin Solid Films , vol.384 , pp. 173
- Wang, Y.¹ Lin, J.² Huan, C.H.A.³ Feng, Z.C.⁴ Chua, S.J.⁵

9
- 0011778718
- N. Nordell, S. Nishino, J.-W.Yang, C. Jacob and P. Pirouz: Appl. Phys. Lett. Vol.64 (1994).p. 1647.
- (1994) Appl. Phys. Lett , vol.64 , pp. 1647
- Nordell, N.¹ Nishino, S.² Yang, J.W.³ Jacob, C.⁴ Pirouz, P.⁵

10
- 0028413211
- T. Zehnder, A. Blatter, and A. Bachli: Thin Solid Films Vol.241 (1994),p.138.
- (1994) Thin Solid Films , vol.241 , pp. 138
- Zehnder, T.¹ Blatter, A.² Bachli, A.³

11
- 0033689807
- J. S. Pelt, M. E. Ramsey and S. M. Durbin: Thin Solid Films Vol.371 (2000).p.72.
- (2000) Thin Solid Films , vol.371 , pp. 72
- Pelt, J.S.¹ Ramsey, M.E.² Durbin, S.M.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.