Application of the TRM self-calibration on standard silicon substrates

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2003, Pages 109-112

  Gillon, Renaud ^a   Tatinian, William ^a   Landat, Benoît ^b  

^a ON SEMICONDUCTOR   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BANDWIDTH; CALIBRATION; CMOS INTEGRATED CIRCUITS; RESISTORS; SUBSTRATES;

SILICON SUBSTRATES;

SILICON WAFERS;

EID: 0037966384     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. R. Gillon, L. Martens, D. Vanhoenacker, "Comparing de-embedding strategies for on-wafer S-parameter measurements : in-situ calibration and immittance correction", Proc. of ICMTS 2000
2. D. F. Williams, R. B. Marks, "LRM Probe-Tip Calibrations using Nonideal Standards", IEEE Microwave and Guided Waves Letters, vol. 43, pp. 466-469, Feb. 1995.
3. E. J. Eul, B. Schiek, "Thru-Relfect-Match : One Result of a Rigorous Theory for De-embedding and Network Analyzer Calibration", Proceedings of the 18th European Microwave Conference, Sep. 1988
4. R. Gillon, J.-P. Raskin, D. Vanhoenacker, J.-P. Colinge, "Determination of the Reference Impedance in On-Wafer TRL Calibrations",Proceedings of the 26th European Microwave Conference, Sep. 1996
5. H. Heuermann, "B. Schick", IEEE Trans. MTT, Vol.43, no 2, pp. 18-23, 1994