Interfacial reactions and ohmic contact formation in the Ni/Al-6H SiC system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 5, 1996, Pages 3252-3256

  Marinova, Ts ^a   Yakimova, R ^b   Krastev, V ^a   Hallin, C ^b   Janzen E ^b  

^a INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY   (Bulgaria)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037961904     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588816     Document Type: Article

References (11)

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