Laser micro-machining of waveguide devices for sub-mm and far IR interferometry and detector arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4852, Issue 2, 2002, Pages 568-580

  D'Aubigny, Christian Y Drouët ^a   Walker, Christopher K ^a   Golish, Dathon ^a   Swain, Mark R ^b   Dumont, Philip J ^b   Lawson, Peter R ^b  

^a UNIVERSITY OF ARIZONA   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Chemical etching; Detector arrays; FIR; Interferometry; Laser machining; Silicon; THz; Waveguide

Indexed keywords

DETECTORS; LASER APPLICATIONS; MICROMACHINING; SILICON WAFERS; WAVEGUIDES;

DETECTOR ARRAYS; LASER MICRO-MACHINING; WAVEGUIDE DEVICES;

INTERFEROMETRY;

EID: 0037950552     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.460865     Document Type: Conference Paper

References (6)

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