Photoluminescence of ZnO films deposited on Si substrate by RF magnetron sputtering

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 24, Issue 2, 2003, Pages 157-161

  Wang, Qingpu ^a   Zhang, Deheng ^a   Xue, Zhongying ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Photoluminescence; RF magnetron sputtering; Si substrate; ZnO films

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; PHOTOLUMINESCENCE; SEMICONDUCTING ZINC COMPOUNDS; SILICON; X RAY DIFFRACTION;

SILICON SUBSTRATE;

THIN FILMS;

EID: 0037908944     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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