Morphology changes of Si(0 0 1) surfaces during wet chemical halogenation

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 595-600

  Pedemonte, Laura ^a   Bracco, Gianangelo ^a   Relini, Annalisa ^a   Rolandi, Ranieri ^a   Narducci, Dario ^b  

^a UNIVERSITY OF GENOA   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Atomic force microscopy; Etching; Organic films; Silicon; Surface morphology

Indexed keywords

AROMATIC COMPOUNDS; ATOMIC FORCE MICROSCOPY; ETCHING; GRAFTING (CHEMICAL); HALOGENATION; MORPHOLOGY; NANOSTRUCTURED MATERIALS; SELF ASSEMBLY; SURFACE ROUGHNESS;

ORGANIC FILMS;

SILICON;

EID: 0037903248     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00133-8     Document Type: Conference Paper

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