C implantation and surface degradation of InGaP

Journal of Electronic Materials

Volumn 25, Issue 10, 1996, Pages 1640-1644

  Vartuli, C B ^a   Abernathy, C R ^a   Pearton, S J ^a   Zolper, J C ^b   Howard, A J ^b  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Carbon ion implantation; InGaP; Self compensation

Indexed keywords

EID: 0037879226     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02655590     Document Type: Article

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