Retroreflective grating analysis versus physical measurements of surface contour

Optical Engineering

Volumn 37, Issue 5, 1998, Pages 1464-1467

  Zhang, Xianzhu ^a,b,c,d   North, Walter P ^a,e  

^a UNIVERSITY OF WINDSOR   (Canada)

^b UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^c SOUTHEAST UNIVERSITY   (China)

^d NANJING RESEARCH INSTITUTE OF ELECTRONICS TECHNOLOGY   (China)

^e UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Grating analysis; Noncontact measurement; Retroreflection; Surface contour

Indexed keywords

EID: 0037862742     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601661     Document Type: Article

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