A scheduling and resource optimising MES for the semiconductor and MEMS industry

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2003, Pages 101-105

  Sieberg, Jürgen ^a   Walter, Ricco ^a  

^a ABAKUS Software GmbH   (Germany)

Author keywords

Equipment integration; MES; Process dispatcher; Process scheduler; Recipe management

Indexed keywords

CLEAN ROOMS; ENTERPRISE RESOURCE PLANNING; FACTORY AUTOMATION; OPTIMIZATION; PROCESS CONTROL; SCHEDULING;

MANUFACTURING EXECUTION SYSTEM; PROCESS DISPATCHER; PROCESS SCHEDULER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0037843284     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)