Optimum physical-chemical pre-treatment of copper damascene wastewater

Water Science and Technology

Volumn 47, Issue 10, 2003, Pages 71-77

  Smith, Ed ^a   Bayan, M ^b   Daniels, M ^c  

^a The American University in Cairo   (Egypt)

^b SOUTHERN METHODIST UNIVERSITY   (United States)

^c TEXAS INSTRUMENTS   (United States)

Author keywords

Copper; High solis wastewater; Industrial wastewater treatment; Physical chemical treatment; Semiconductor wastewater

Indexed keywords

ALUMINUM; CHEMICAL MECHANICAL POLISHING; COPPER; ION EXCHANGE; PRECIPITATION (CHEMICAL); REDUCTION; RESINS; SEWERS; TURBIDITY;

PROCESS CHEMISTRY;

WASTEWATER TREATMENT;

ALUMINUM; COPPER; POLYMER;

COPPER; ION EXCHANGE; PHYSICOCHEMICAL PROPERTY; SEMICONDUCTOR; WASTEWATER TREATMENT;

CATION EXCHANGE; CHEMICAL PROCEDURES; CONFERENCE PAPER; COST; EFFLUENT STANDARD; HAZARDOUS WASTE; INDUSTRIAL WASTE; ION EXCHANGE; MATERIALS HANDLING; MATHEMATICAL COMPUTING; METAL RECOVERY; PHYSICAL CHEMISTRY; PRECIPITATION; SEMICONDUCTOR; SEWER; SOLID STATE; SOLID WASTE MANAGEMENT; TURBIDITY; WASTE COMPONENT REMOVAL; WASTE DISPOSAL; WASTE WATER MANAGEMENT; WASTE WATER RECYCLING;

EID: 0037828892     PISSN: 02731223     EISSN: None     Source Type: Journal    
DOI: 10.2166/wst.2003.0541     Document Type: Conference Paper

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