Analysis and experimental verification of micro fluidic integrated circuits using analogous relationship between pneumatic microvalve and MOSFET

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 185-188

  Takao, Hidekuni ^a   Ishida, Makoto ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF FLUIDS; FLUIDIC AMPLIFIERS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED CIRCUITS; MOSFET DEVICES; PRESSURE; VALVES (MECHANICAL);

INTEGRATED PRESSURE INVERTING AMPLIFIERS; MICROFLUIDIC INTEGRATED CIRCUITS; PNEUMATIC MICROVALVE;

MICROELECTROMECHANICAL DEVICES;

EID: 0037818325     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. H.Takao, M.Ishida, K.Sawada, "A pneumatically-actuated silicon microvalve and its application to functional fluidic integrated circuits", Proc. of Transducers '01, pp. 946-949, 2001.
4. H.Takao, M.Ishida, K.Sawada, "A Pneumatically Actuated Full In-Channel Microvalve with MOSFET-Like Function in Fluid Channel Networks", J. Microelectromechanical Systems, vol. 11, no. 5, pp. 421-426, 2002.
5. G. E. Davies, "Fluidics in aircraft engine controls", Trans. ASME J. of Dyn. Syst. Meas. Control, Vol. 103, no. 4, pp. 324-330, 1981.
6. Y.P.Tsividis, "Design considerations in single-channel MOS analog integrated circuits", IEEE J. Solid-State Circuits, vol. SC-13, pp. 383-391, 1978.