Visualization of bubbles generated by micro heaters with various current density distributions

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 197-200

  Lim, Ji Hyuk ^a   Lee, Yong Soo ^a   Lim, Hyung Taek ^a   Baek, Seog Soon ^a   Kuk, Keon ^a   Oh, Yong Soo ^a  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BUBBLE FORMATION; CURRENT DENSITY; ELECTRIC CURRENT DISTRIBUTION; HEATING EQUIPMENT; MICROACTUATORS; TEMPERATURE CONTROL; VISUALIZATION;

CURRENT DENSITY DISTRIBUTION; MICROHEATERS; THERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037818324     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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