Structural refinement of SnO2 thin film prepared by plasma-enhanced chemical vapor deposition

Materials Letters

Volumn 57, Issue 22-23, 2003, Pages 3653-3659

  Kim, Yong Il ^a   Nahm, Seung Hoon ^a   Jung, Maeng Joon ^b  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Preferred orientation; Structural refinement; Thin film

Indexed keywords

CRYSTAL LATTICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; TIN COMPOUNDS;

STRUCTURAL REFINEMENT;

THIN FILMS;

EID: 0037804138     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(03)00143-5     Document Type: Article

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