|
Volumn 532-535, Issue , 2003, Pages 1209-1218
|
Towards the atomic-scale fabrication of a silicon-based solid state quantum computer
|
Author keywords
Adsorption kinetics; Electrical transport (conductivity, resistivity, mobility, etc.); Molecular beam epitaxy; Phosphine; Scanning tunneling microscopy; Silicon; Solid gas interfaces; Surface diffusion
|
Indexed keywords
ADSORPTION;
COMPUTERS;
DOPING (ADDITIVES);
MOLECULAR BEAM EPITAXY;
PHOSPHORUS;
SILICON;
SOLID STATE QUANTUM COMPUTERS;
QUANTUM THEORY;
|
EID: 0037799833
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(03)00485-0 Document Type: Conference Paper |
Times cited : (30)
|
References (20)
|