The structure and mechanical properties of multilayer TiN/(Ti0.5Al0.5)N coatings deposited by plasma enhanced chemical vapor deposition

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 433-437

  Lee, Dong Kak ^a   Lee, Seung Hoon ^a   Lee, Jung Joong ^a  

^a Seoul National University   (South Korea)

Author keywords

Columnar structure; Multilayer coatings; Plasma enhanced chemical vapor deposition

Indexed keywords

COATINGS; CRYSTAL STRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; STEEL; TITANIUM COMPOUNDS;

LAYER BOUNDARIES;

MULTILAYERS;

COATING; PLASMA TREATMENT; STRUCTURAL ANALYSIS; SURFACE TREATMENT; TITANIUM NITRIDE; VAPOR DEPOSITION;

EID: 0037792881     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00184-1     Document Type: Article

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