Verification of the micromechanical characteristics of electrostatic linear actuators

Sensors and Actuators, A: Physical

Volumn 53, Issue 1-3, 1996, Pages 416-422

  Kohl, M ^a   Gottert J ^a   Mohr, J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Electrostatic microactuators; Force measurements; Integrated optics; LIGA process; Optical detection of motion

Indexed keywords

EID: 0037787490     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01143-0     Document Type: Article

References (8)

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