Atomic structure of the steps on Si(001) studied by scanning tunneling microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 906-908

  Komura, T ^a   Yoshimura, M ^a,c   Yao, T ^b  

^a HIROSHIMA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037787424     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589172     Document Type: Article

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