Development of laser holographic interference system for optical grating fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3185, Issue , 1997, Pages 110-116

  Xu, Feng Lan ^a   Lam, Yee Loy ^a   Chan, Yuen Chuen ^a   Zhou, Yan ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diffraction; Gratings; Holographic interference exposure; Photolithography

Indexed keywords

DIFFRACTION; HELIUM; INSTRUMENTS; LASERS; OPTICAL INSTRUMENTS; OPTICAL MICROSCOPY; PHOTORESISTORS; SURFACE TREATMENT;

COATED SAMPLES; CONVENTIONAL PHOTOLITHOGRAPHIES; EXPOSURE SYSTEMS; GLASS SUBSTRATES; GRATING PERIODS; GRATINGS; HOLOGRAPHIC INTERFERENCE EXPOSURE; INTEGRATED OPTICAL DEVICES; INTERFERENCE PATTERNS; LASER LIGHTS; OPTICAL DIFFRACTIONS; OPTICAL GRATINGS; PERIODIC CORRUGATIONS; PERIODIC PATTERNS; SILICON SAMPLES;

LIGHT;

EID: 0037758650     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284034     Document Type: Conference Paper

References (6)

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